[C-7-4L] Novel Vertical AlGaN Deep Ultra Violet Photo–detector on n+Si Substrate using Spontaneous Via Holes Growth Technique

K. Ozeki¹、N. Kurose¹、N. Iwata²、K. Shibano¹、T. Araki¹、I. Kamiya²、Y. Aoyagi¹ (1.Ritsumeikan Univ.、2.Toyota Technological Inst. (Japan))

https://doi.org/10.7567/SSDM.2014.C-7-4L