The Japan Society of Applied Physics

[C-8-3] Impact of Hydrogen Surfactant Epitaxy and Annealing on Crystallinity of Epitaxial Ge1-xSnx Layers

T. Asano1,2, N. Taoka3, K. Hozaki1, W. Takeuchi1, M. Sakashita1, O. Nakatsuka1, S. Zaima1 (1.Nagoya Univ., 2.JSPS Research Fellow, 3.IHP (Japan))

https://doi.org/10.7567/SSDM.2014.C-8-3