The Japan Society of Applied Physics

[C-8-3] Impact of Hydrogen Surfactant Epitaxy and Annealing on Crystallinity of Epitaxial Ge1-xSnx Layers

T. Asano1,2、N. Taoka3、K. Hozaki1、W. Takeuchi1、M. Sakashita1、O. Nakatsuka1、S. Zaima1 (1.Nagoya Univ.、2.JSPS Research Fellow、3.IHP (Japan))

https://doi.org/10.7567/SSDM.2014.C-8-3