Impact of Hydrogen Surfactant Epitaxy and Annealing on Crystallinity of Epitaxial Ge<sub>1-x</sub>Sn<sub>x</sub> Layers

2014 International Conference on Solid State Devices and Materials

2014年9月8日〜 2014年9月11日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

T. Asano^1,2、N. Taoka³、K. Hozaki¹、W. Takeuchi¹、M. Sakashita¹、O. Nakatsuka¹、S. Zaima¹ (1.Nagoya Univ.、2.JSPS Research Fellow、3.IHP (Japan))