[C-9-1] Deposition of Thin Si, Ge, and SiGe Films by Ballistic Hot Electron Reduction

M. Yagi¹, R. Suda¹, A. Kojima¹, R. Mentek¹, N. Mori², J. Shirakashi¹, N. Koshida¹ (1.Tokyo Univ. of Agri. & Tech., 2.Osaka Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.C-9-1