[C-9-3] Versatile Doping Technique for Diamond by Solid Dopant Immersion During Microwave Plasma CVD

T. Tamura¹、T. Yanase¹、T. Nagahama¹、S. Sato²、T. Shimada¹ (1.Hokkaido Univ.、2.Arios Inc. (Japan))

https://doi.org/10.7567/SSDM.2014.C-9-3