[C-9-3] Versatile Doping Technique for Diamond by Solid Dopant Immersion During Microwave Plasma CVD

T. Tamura¹, T. Yanase¹, T. Nagahama¹, S. Sato², T. Shimada¹ (1.Hokkaido Univ., 2.Arios Inc. (Japan))

https://doi.org/10.7567/SSDM.2014.C-9-3