[F-2-4] Spatial Variation of the Work Function in Nano-crystalline TiN Films Measured by Dual-Mode Scanning Tunneling Microscopy

L. Bolotov¹, K. Fukuda¹, T. Tada¹, T. Matsukawa¹, M. Masahara¹ (1.AIST (Japan))

https://doi.org/10.7567/SSDM.2014.F-2-4