The Japan Society of Applied Physics

[F-4-1] Nickel Compound and Alloy Contacts to Nanoscale Si, Ge, and InGaAs Channels

R. Chen1, B.-M. Nguyen1,2, W. Tang2,3, S.A. Dayeh1 (1.Univ. of California San Diego, 2.Los Alamos National Laboratory, 3.Univ. of California Los Angeles (USA))

https://doi.org/10.7567/SSDM.2014.F-4-1