[G-1-2] Improvement of Motional Resistance through Concave TSV Design and Modification for Static Capacitance of TSV-Based Resonator

J.Y. Shih¹, Y.C. Chen², C.H. Chiu², C.L. Lo², K.N. Chen¹ (1.NCTU, 2.TXC Corp. (Taiwan))

https://doi.org/10.7567/SSDM.2014.G-1-2