[G-1-2] Improvement of Motional Resistance through Concave TSV Design and Modification for Static Capacitance of TSV-Based Resonator

J.Y. Shih¹、Y.C. Chen²、C.H. Chiu²、C.L. Lo²、K.N. Chen¹ (1.NCTU、2.TXC Corp. (Taiwan))

https://doi.org/10.7567/SSDM.2014.G-1-2