[G-7-4] Fabrication And Optical Characterization Of α-Germanium Nano Disk Structure Using Bio-Template And Neutral Beam Etching for Solar Cell Application

M.T. Chentir^1,2、T. Fujii^1,3、T. Okada¹、T. Isoda⁴、K. Itoh^2,4、H. Endo³、Y. Hoshi⁵、N. Usami⁵、S. Samukawa^1,2,6 (1.Inst. of Fluid Sci., Tohoku Univ.、2.CREST Japan Sci. and Tech. Agency、3.Honda R&D Co., Ltd.、4.Keio Univ.、5.Nagoya Univ.、6.WPI-Advanced Inst. for Materials Res., Tohoku Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.G-7-4