[G-7-4] Fabrication And Optical Characterization Of α-Germanium Nano Disk Structure Using Bio-Template And Neutral Beam Etching for Solar Cell Application

M.T. Chentir^1,2, T. Fujii^1,3, T. Okada¹, T. Isoda⁴, K. Itoh^2,4, H. Endo³, Y. Hoshi⁵, N. Usami⁵, S. Samukawa^1,2,6 (1.Inst. of Fluid Sci., Tohoku Univ., 2.CREST Japan Sci. and Tech. Agency, 3.Honda R&D Co., Ltd., 4.Keio Univ., 5.Nagoya Univ., 6.WPI-Advanced Inst. for Materials Res., Tohoku Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.G-7-4