[H-2-2] Chemical Vapor Deposition of Hexagonal Boron Nitride Films on c-plane Sapphire Substrates

N. Umehara¹、I. Kuwahara¹、T. Kouno¹、H. Kominami¹、Y. Nakanishi¹、K. Hara¹ (1.Shizuoka Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.H-2-2