[H-2-2] Chemical Vapor Deposition of Hexagonal Boron Nitride Films on c-plane Sapphire Substrates

N. Umehara¹, I. Kuwahara¹, T. Kouno¹, H. Kominami¹, Y. Nakanishi¹, K. Hara¹ (1.Shizuoka Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.H-2-2