[H-3-6] KPFM Observation of Quantum Dots Induced by Clustered Donors in Selectively-Doped SOI-FETs

K. Tyszka^1,2、D. Moraru¹、T. Mizuno¹、R. Jablonski²、M. Tabe¹ (1.Shizuoka Univ.、2.Warsaw Univ. of Tech. (Japan))

https://doi.org/10.7567/SSDM.2014.H-3-6