[H-3-6] KPFM Observation of Quantum Dots Induced by Clustered Donors in Selectively-Doped SOI-FETs

K. Tyszka^1,2, D. Moraru¹, T. Mizuno¹, R. Jablonski², M. Tabe¹ (1.Shizuoka Univ., 2.Warsaw Univ. of Tech. (Japan))

https://doi.org/10.7567/SSDM.2014.H-3-6