[M-6-1] A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers

D. Yamane¹、T. Konishi²、T. Matsushima²、H. Toshiyoshi³、K. Masu¹、K. Machida^1,2 (1.Tokyo Tech、2.NTT Advanced Tech. Corp.、3.Univ. of Tokyo (Japan))

https://doi.org/10.7567/SSDM.2014.M-6-1