A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers

D. Yamane; T. Konishi; T. Matsushima; H. Toshiyoshi; K. Masu; K. Machida

doi:https://doi.org/10.7567/SSDM.2014.M-6-1

2014 International Conference on Solid State Devices and Materials

Sep 8, 2014 - Sep 11, 2014
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[M-6-1] A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers

D. Yamane¹, T. Konishi², T. Matsushima², H. Toshiyoshi³, K. Masu¹, K. Machida^1,2 (1.Tokyo Tech, 2.NTT Advanced Tech. Corp., 3.Univ. of Tokyo (Japan))

https://doi.org/10.7567/SSDM.2014.M-6-1

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