[N-1-1] Nitrogen doping of 4H-SiC by excimer laser irradiation in liquid nitrogen

A. Ikeda¹、D. Marui¹、H. Ikenoue¹、T. Asano¹ (1.Kyushu Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.N-1-1