[N-1-2] An experiment on the alleviation of wafer-bending for CVD grown heavily Al-doped 4H-SiC epi-wafer by co-doping of N

S.Y. Ji¹、K. Kojima¹、Y. Ishida¹、S. Saito¹、H. Yamaguchi¹、S. Yoshida¹、H. Tsuchida²、H. Okumura¹ (1.AIST、2.CRIEPI (Japan))

https://doi.org/10.7567/SSDM.2014.N-1-2