[N-1-2] An experiment on the alleviation of wafer-bending for CVD grown heavily Al-doped 4H-SiC epi-wafer by co-doping of N

S.Y. Ji¹, K. Kojima¹, Y. Ishida¹, S. Saito¹, H. Yamaguchi¹, S. Yoshida¹, H. Tsuchida², H. Okumura¹ (1.AIST, 2.CRIEPI (Japan))

https://doi.org/10.7567/SSDM.2014.N-1-2