[N-1-4] Heteroepitaxial growth of diamond films on 3C-SiC(001)/Si substrates by antenna-edge microwave plasma CVD

J. Yaita^1,2、T. Iwasaki^1,2,3、M. Natal⁴、S.E. Saddow⁴、M. Hatano^1,2,3 (1.Tokyo Tech、2.JST-CREST、3.JST-ALCA、4.Univ. of South Florida (Japan))

https://doi.org/10.7567/SSDM.2014.N-1-4