[N-1-4] Heteroepitaxial growth of diamond films on 3C-SiC(001)/Si substrates by antenna-edge microwave plasma CVD

J. Yaita^1,2, T. Iwasaki^1,2,3, M. Natal⁴, S.E. Saddow⁴, M. Hatano^1,2,3 (1.Tokyo Tech, 2.JST-CREST, 3.JST-ALCA, 4.Univ. of South Florida (Japan))

https://doi.org/10.7567/SSDM.2014.N-1-4