[P-9-2] Direct Deposition of High-k Y₂O₃ on h-BN by Atomic Layer Deposition

N. Takahashi¹, K. Watanabe², T. Taniguchi², K. Nagashio¹ (1.Univ. of Tokyo, 2.NIMS (Japan))

https://doi.org/10.7567/SSDM.2014.P-9-2