[PS-1-11] Reliability of Polycrystalline HfO₂ Thin Films Directly Bonded to Si Substrates

R. Hasunuma¹、Y. Tomura¹、K. Yamabe¹ (1.Univ. of Tsukuba (Japan))

https://doi.org/10.7567/SSDM.2014.PS-1-11