[PS-1-13L] Toward 1-nm-EOT Hf_0.5Zr_0.5O₂ Ferroelectric Films

T. Nishimura¹, T. Yajima¹, K. Nagashio¹, A. Toriumi¹ (1.The Univ. of Tokyo (Japan))

https://doi.org/10.7567/SSDM.2014.PS-1-13L