[PS-1-15L] Properties of ultrathin body condensation GOI films thinned by additional thermal oxidation

W.K. Kim^1,2、M. Takenka^1,2、S. Takagi^1,2 (1.The Univ. of Tokyo、2.JST-CREST (Japan))

https://doi.org/10.7567/SSDM.2014.PS-1-15L