[PS-1-7] Thickness Dependences of Stress, Poisson’s Ratio and Longitudinal Optical Phonon Lifetime in Ultrathin Strained-Silicon-on-Insulator

V. Poborchii¹、M. Hara¹、T. Tada¹ (1.AIST (Japan))

https://doi.org/10.7567/SSDM.2014.PS-1-7