Surface Modified Poly-crystalline Silicon Nanowires Field Effect Transistor for Ammonia Gas Sensor

W.T. Kuo; Y.R. Lo; Y.S. Yang; H.M.P. Chen

doi:https://doi.org/10.7567/SSDM.2014.PS-11-2

2014 International Conference on Solid State Devices and Materials

2014年9月8日〜 2014年9月11日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[PS-11-2] Surface Modified Poly-crystalline Silicon Nanowires Field Effect Transistor for Ammonia Gas Sensor

W.T. Kuo¹、Y.R. Lo²、Y.S. Yang²、H.M.P. Chen^1,3 (1.Department of Photonics, NCTU、2.Department of Biological Science and Technology, NCTU、3.Institute of Biomedical Engineering, NCTU (Taiwan))

https://doi.org/10.7567/SSDM.2014.PS-11-2

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