Surface Modified Poly-crystalline Silicon Nanowires Field Effect Transistor for Ammonia Gas Sensor

W.T. Kuo; Y.R. Lo; Y.S. Yang; H.M.P. Chen

doi:https://doi.org/10.7567/SSDM.2014.PS-11-2

2014 International Conference on Solid State Devices and Materials

Sep 8, 2014 - Sep 11, 2014
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[PS-11-2] Surface Modified Poly-crystalline Silicon Nanowires Field Effect Transistor for Ammonia Gas Sensor

W.T. Kuo¹, Y.R. Lo², Y.S. Yang², H.M.P. Chen^1,3 (1.Department of Photonics, NCTU, 2.Department of Biological Science and Technology, NCTU, 3.Institute of Biomedical Engineering, NCTU (Taiwan))

https://doi.org/10.7567/SSDM.2014.PS-11-2

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