[PS-11-7] Conductive Diamond-like Carbon Film Deposition by Low Temperature Neutral Beam Enhanced Chemical Vapor Deposition for Bio-LSIs

X.J. Chang¹、Y. Kikuchi^1,2、T. Kubota¹、K.Y. Inoue³、T. Matsue^3,4、S. Samukawa^1,4 (1.Inst. of Fluid Sci., Tohoku Univ.、2.Tokyo Electron Ltd.、3.Grad. Sch. of Environ., Tohoku Univ.、4.WPI-Adv. Inst. Mat. Res., Tohoku Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.PS-11-7