[PS-11-7] Conductive Diamond-like Carbon Film Deposition by Low Temperature Neutral Beam Enhanced Chemical Vapor Deposition for Bio-LSIs

X.J. Chang¹, Y. Kikuchi^1,2, T. Kubota¹, K.Y. Inoue³, T. Matsue^3,4, S. Samukawa^1,4 (1.Inst. of Fluid Sci., Tohoku Univ., 2.Tokyo Electron Ltd., 3.Grad. Sch. of Environ., Tohoku Univ., 4.WPI-Adv. Inst. Mat. Res., Tohoku Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.PS-11-7