[PS-14-12L] Generation and suppression of oxidation byproducts at 4H-SiC C-face / SiO₂ interface characterized by infrared spectroscopy

H. Hirai¹、K. Kita^1,2 (1.The Univ. of Tokyo、2.JST-PRESTO (Japan))

https://doi.org/10.7567/SSDM.2014.PS-14-12L