Investigation of chemical-bonding state and fixed charge state of Sr<sub>2</sub>SiO<sub>4</sub> film on Si(100) substrate

2014 International Conference on Solid State Devices and Materials

2014年9月8日〜 2014年9月11日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

S. Taniwaki¹、Y. Hotta^1,3、H. Yoshida^1,3、K. Arafune^1,3、A. Ogura^2,3、S. Satoh^1,3 (1.Univ. of Hyogo、2.Meiji Univ.、3.JST-CREST (Japan))