[PS-15-6] Investigation of chemical-bonding state and fixed charge state of Sr₂SiO₄ film on Si(100) substrate

S. Taniwaki¹, Y. Hotta^1,3, H. Yoshida^1,3, K. Arafune^1,3, A. Ogura^2,3, S. Satoh^1,3 (1.Univ. of Hyogo, 2.Meiji Univ., 3.JST-CREST (Japan))

https://doi.org/10.7567/SSDM.2014.PS-15-6