[PS-2-3] Measurement on Interfacial Adhesion Property of Low-k Thin Film by the Surface Acoustic Waves Using the Cohesion Zone Model

X. Xiao¹、Y. Tao¹、T. Kikkawa² (1.Univ. of Tianjin、2.Hiroshima Univ. (China))

https://doi.org/10.7567/SSDM.2014.PS-2-3