[PS-2-4L] Vacuum Ultraviolet (VUV) / Vapor-Assisted Bonding for Organic / Inorganic Hybrid Integration

A. Shigetou¹, M. Ajayan^1,2, J. Mizuno², S. Shuichi² (1.National Inst. for Mater. Sci., 2.Waseda Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.PS-2-4L