[PS-3-5] Initial and Long-Term Frequency Degradation on Ring Oscillators from Plasma Induced Damage in 65 nm Bulk and Silicon On Thin BOX processes

R. Kishida¹、A. Oshima¹、M. Yabuuchi¹、K. Kobayashi¹ (1.Kyoto Inst. of Tech. (Japan))

https://doi.org/10.7567/SSDM.2014.PS-3-5