A Novel Electromechanical Model of a MEMS Energy Harvesting Device for a Multi-physics Simulation Platform on a Circuit Simulator

T. Konishi; T. Matsushima; D. Yamane; K. Masu; H. Toshiyoshi; K. Machida

doi:https://doi.org/10.7567/SSDM.2014.PS-5-4

2014 International Conference on Solid State Devices and Materials

Sep 8, 2014 - Sep 11, 2014
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[PS-5-4] A Novel Electromechanical Model of a MEMS Energy Harvesting Device for a Multi-physics Simulation Platform on a Circuit Simulator

T. Konishi¹, T. Matsushima¹, D. Yamane², K. Masu², H. Toshiyoshi³, K. Machida^1,2 (1.NTT Advanced Tech. Corp., 2.Tokyo Tech, 3.Univ. of Tokyo (Japan))

https://doi.org/10.7567/SSDM.2014.PS-5-4

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