[PS-5-4] A Novel Electromechanical Model of a MEMS Energy Harvesting Device for a Multi-physics Simulation Platform on a Circuit Simulator

T. Konishi¹、T. Matsushima¹、D. Yamane²、K. Masu²、H. Toshiyoshi³、K. Machida^1,2 (1.NTT Advanced Tech. Corp.、2.Tokyo Tech、3.Univ. of Tokyo (Japan))

https://doi.org/10.7567/SSDM.2014.PS-5-4