The Japan Society of Applied Physics

[PS-6-11] Fabrication and Characteristics of Fully–Transparent Al–Sn–Zn–O TFTs Fabricated on Glass at Low Temperature

Y.Y. Cong1, D.D. Han1, J. Wu1,2, N.N. Zhao1,2, Z.F. Chen1,2, F.L. Zhao1,2, J.C. Dong1,2, S.D. Zhang2, X. Zhang1, Y. Wang1 (1.Inst. of Microelectronics, Peking Univ., 2.Shenzhen Graduate School, Peking Univ. (China))

https://doi.org/10.7567/SSDM.2014.PS-6-11