[PS-6-13] Fabrication of High Performance Ultra-thin body SnO₂ Thin-Film-Transistors (TFTs) using Microwave Annealing

S.W. Moon¹、H.J. Jang¹、W.J. Cho¹ (1.Department of Electronic Materials Eng, Kwangwoon Univ. (Korea))

https://doi.org/10.7567/SSDM.2014.PS-6-13