The Japan Society of Applied Physics

2014 International Conference on Solid State Devices and Materials

2014 International Conference on Solid State Devices and Materials

Sep 8, 2014 - Sep 11, 2014
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[PS-6-13] Fabrication of High Performance Ultra-thin body SnO2 Thin-Film-Transistors (TFTs) using Microwave Annealing

S.W. Moon1, H.J. Jang1, W.J. Cho1 (1.Department of Electronic Materials Eng, Kwangwoon Univ. (Korea))

https://doi.org/10.7567/SSDM.2014.PS-6-13