Fully Transparent Dual-active-layer ITO/TZO TFT Fabricated on Glass Substrate at low-temperature

Z.F. Chen; D.D. Han; N.N. Zhao; J. Wu; Y.Y. Cong; J.C. Dong; F.L. Zhao; S.D. Zhang; X. Zhang; Y. Wang; L.F. Liu

doi:https://doi.org/10.7567/SSDM.2014.PS-6-14

2014 International Conference on Solid State Devices and Materials

2014年9月8日〜 2014年9月11日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[PS-6-14] Fully Transparent Dual-active-layer ITO/TZO TFT Fabricated on Glass Substrate at low-temperature

Z.F. Chen^1,2、D.D. Han²、N.N. Zhao^1,2、J. Wu^1,2、Y.Y. Cong²、J.C. Dong^1,2、F.L. Zhao^1,2、S.D. Zhang^1,2、X. Zhang^1,2、Y. Wang²、L.F. Liu² (1.Shenzhen Gradnate School, Peking Univ.、2.Inst. of Microelectronics, Peking Univ. (China))

https://doi.org/10.7567/SSDM.2014.PS-6-14

▲