[PS-7-1] Structure Dependence of over 10 GHz Lateral Si-PIN Photodiode Fabricated by CMOS Compatible Process

G. Li¹、K. Maekita¹、T. Maruyama¹、K. Iiyama¹ (1.Kanazawa Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.PS-7-1