Scaling Study of Antenna-Coupled Microbolometer

A. Tiwari; H. Satoh; M. Aoki; M. Takeda; N. Hiromoto; H. Inokawa

doi:https://doi.org/10.7567/SSDM.2014.PS-7-14

2014 International Conference on Solid State Devices and Materials

2014年9月8日〜 2014年9月11日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[PS-7-14] Scaling Study of Antenna-Coupled Microbolometer

A. Tiwari¹、H. Satoh¹、M. Aoki²、M. Takeda²、N. Hiromoto²、H. Inokawa¹ (1.Research Institute of Electronics, Shizuoka Univ.、2.Graduate School of Engineering, Shizuoka Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.PS-7-14

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