[PS-7-8] The Improvement of Surface Current of 2.6 μm InGaAs Photodetectors by Using ICPCVD Technology

X. Ji¹, B. Liu¹, H. Tang², X. Li², M. Shi², Y. Zhou¹, Y. Xu¹, H. Gong², F. Yan¹ (1.Nanjing Univ., 2.Chinese Academy of Sci. (China))

https://doi.org/10.7567/SSDM.2014.PS-7-8