[PS-7-8] The Improvement of Surface Current of 2.6 μm InGaAs Photodetectors by Using ICPCVD Technology

X. Ji¹、B. Liu¹、H. Tang²、X. Li²、M. Shi²、Y. Zhou¹、Y. Xu¹、H. Gong²、F. Yan¹ (1.Nanjing Univ.、2.Chinese Academy of Sci. (China))

https://doi.org/10.7567/SSDM.2014.PS-7-8