The Japan Society of Applied Physics

2014 International Conference on Solid State Devices and Materials

2014 International Conference on Solid State Devices and Materials

Sep 8, 2014 - Sep 11, 2014
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[PS-8-18] Behavior of Focused Ga+ Beam Spot Milling and its Superimposition Propetry

H.M. Chen1, P.J. Wu2, K.Y. Shen1, C.H. Kuan1,2 (1.Graduate Inst. of Electronics Engineering, National Taiwan Univ., 2.Graduate Inst. of Biomedical Electronics and Bioinformatics, National Taiwan Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2014.PS-8-18